A commonly used design principle for customized inert gas enclosures is called the hood design. This approach is specifically applied when system platforms fetauring baseplates shall be enclosed in an inert environment. During the engineering phase the hood is precisely suited to the size of the base plate and secured via pre drilled screw holes. After assembly and testing, the hood is attached from above to the baseplate and properly sealed. All necessary feedthroughs, transfer ports such as load locks and antechambers and supporting components such as cooling units are integrated into the enclosure walls so that no mechanical changes to the process tool become necessary.
This approach has been proven successful for many equipment types such as industrial dispensers, robots and transfer units, X-Ray diffractometers, getter mounting units, welding systems, complete battery manufacturing lines, entire OLED encapsulation tools and many more.
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